Title:
プラズマアクチュエータ
Document Type and Number:
Japanese Patent JP6678423
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a plasma actuator capable of actively controlling a gas flow in a space region.SOLUTION: A plasma actuator 10 comprises a first electrode 1 on a dielectric layer 21, second electrodes 2-A and 2-B on a dielectric layer 22, which are formed in pectinate shapes opposed to each other, and third electrodes 3-A and 3-B on a dielectric layer 23, which are formed in pectinate shapes opposed to each other; and the first to third electrodes are laminated on one another through the dielectric layers. The plasma actuator is arranged so that plasma is generated in a space region R on the backside of the dielectric layer 23; plasma 2AP is generated by a voltage between the first electrode 1 and the second electrode 2-A; plasma 2BP is generated by a voltage between the first electrode 1 and the second electrode 2-B; plasma 3AP is generated by a voltage between the first electrode 1 and the third electrode 3-A; and plasma 3BP is generated by a voltage between the first electrode 1 and the third electrode 3-B. The applied voltages between the first electrode 1, and the second electrodes 2-A and 2-B and/or the third electrodes 3-A and 3-B are switched.SELECTED DRAWING: Figure 1
Inventors:
Kazuo Shimizu
Application Number:
JP2015203159A
Publication Date:
April 08, 2020
Filing Date:
October 14, 2015
Export Citation:
Assignee:
Micro Plasma Co., Ltd.
International Classes:
H05H1/24; B64C23/00
Domestic Patent References:
| JP2011142025A | ||||
| JP2008159336A | ||||
| JP2011238385A |
Foreign References:
| US20100123046 |
Attorney, Agent or Firm:
Patent business corporation Ota patent office