Title:
PLASMA DEVICE
Document Type and Number:
Japanese Patent JP2020155260
Kind Code:
A
Abstract:
To provide a structure in which a tubular dielectric 3 is less likely to be broken.SOLUTION: A plasma generating part 12 provided in a plasma device 100 has: a tubular dielectric 3 having an inner hollow part which is a passage for plasma generating gas supplied from a supply source; an internal electrode 4 which is disposed in the inner hollow part of the tubular dielectric 3 and extends in an axial direction of the tubular dielectric 3; an external electrode 5 which is disposed along an outer peripheral surface of the tubular dielectric 3 at a position facing the internal electrode 4; and a body part which covers surfaces of the tubular dielectric 3 and the external electrode 5. The body part 2b has a first split body 2d and a second split body 2e which are split into two halves on a cross section extending in an axial direction of an irradiation device. The first split body 2d and the second split body 2e each have an inner peripheral surface 2f which has a shape making surface-contact with the outer peripheral surface of the tubular dielectric 3. In a portion of the inner peripheral surface, there is provided a first recess 2h which has a shape making surface-contact with the surface of the external electrode 5.SELECTED DRAWING: Figure 6
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Inventors:
ATAKA MOTOHARU
NAGAHARA YU
INOUE TAKESHI
UEHARA TAKESHI
NAGAHARA YU
INOUE TAKESHI
UEHARA TAKESHI
Application Number:
JP2019051050A
Publication Date:
September 24, 2020
Filing Date:
March 19, 2019
Export Citation:
Assignee:
SEKISUI CHEMICAL CO LTD
International Classes:
H05H1/26
Attorney, Agent or Firm:
Hiroyuki Nagai
Yukitaka Nakamura
Satoru Asakura
Mari Asano
Yukihiro Hotta
Yasushi Kawasaki
Yukitaka Nakamura
Satoru Asakura
Mari Asano
Yukihiro Hotta
Yasushi Kawasaki