Title:
プラズマドーピング方法及び装置
Document Type and Number:
Japanese Patent JP5263266
Kind Code:
B2
Abstract:
In a plasma torch unit, a conductor rod having a spiral shape is disposed inside a quartz pipe having a surface coated with boron glass, and a brass block is disposed on the periphery thereof. While a gas is being supplied into a cylindrical chamber, a high-frequency power is supplied to the conductor rod and a plasma is generated in the cylindrical chamber, so that a base material is irradiated with the plasma.
Inventors:
Tomohiro Okumura
Mitsuo Saito
Ichiro Nakayama
Kitaoka Taro
Mitsuo Saito
Ichiro Nakayama
Kitaoka Taro
Application Number:
JP2010250440A
Publication Date:
August 14, 2013
Filing Date:
November 09, 2010
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
H01L21/265; H01L21/22; H05H1/46
Domestic Patent References:
| JP1196816A | ||||
| JP9115851A | ||||
| JP9115852A | ||||
| JP2005260139A | ||||
| JP3067498A | ||||
| JP6208955A | ||||
| JP2009084160A1 | ||||
| JP2008504433A | ||||
| JP2004047695A |
Attorney, Agent or Firm:
Hiroki Naito
Kentaro Fujii
Ikuro Terauchi
Kentaro Fujii
Ikuro Terauchi
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