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Patent Searching and Data


Title:
PLASMA FORMING DEVICE
Document Type and Number:
Japanese Patent JP2005216575
Kind Code:
A
Abstract:

To provide a plasma forming device in which plasma and a droplet traveling from an arc discharge part are surely separated, the plasma is led to a plasma progress passage, the droplet is surely sampled in a droplet sampling part, and an approach of the droplet into the plasma progressive passage is prevented.

The plasma formation device is made to generate the plasma by a vacuum arc discharge of the arc discharge part 1, and the droplet by-produced from the cathode at the time of plasma generation is captured to the droplet capturing part 3. The main advancing passage 2 in which the plasma and the droplet advance in a mixed condition, the main advancing passage 2 is branched into the droplet advancing passage 4 in which the droplet advances and a first plasma advancing passage 5 in which the plasma advances, a restricting plate 7 in order to restrict the advancing of the plasma and the droplet at a middle part of the main advancing part 2 is installed, and a slanting wall 8 which reflects the droplet passing through the restricting plate 7 toward the droplet capturing part 3 is installed in the middle part of the droplet advancing passage 4, and formed at a position beyond the first plasma advancing passage 5.


Inventors:
TAKIGAWA HIROSHI
SHIINA YUICHI
Application Number:
JP2004019340A
Publication Date:
August 11, 2005
Filing Date:
January 28, 2004
Export Citation:
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Assignee:
TAKIGAWA HIROSHI
FERROTEC CORP
International Classes:
C23C14/24; C23C14/32; H05H1/50; (IPC1-7): H05H1/50; C23C14/24; C23C14/32
Attorney, Agent or Firm:
Hisami Miki