PLASMA GENERATING DEVICE - RIKAGAKU KENKYUSHO

Title:

PLASMA GENERATING DEVICE

Document Type and Number:

Japanese Patent JPH05326188

Kind Code:

A

Abstract:

PURPOSE: To suppress plasma vibration and take out a charged particle having less energy width.

CONSTITUTION: An intermediate electrode 11 is insulated from a filament chamber F and a discharge chamber D, and connected to the plus side of a discharge power source 20 through a load resistor 21. A screen electrode 12 is insulated from the discharge chamber D and an accelerating chamber A, and connected to the plus side of the discharge power source 20. An accelerating electrode 13 is insulated from the accelerating chamber A and a chamber 1, and connected to the plus side of an accelerating power source 22. The plus side of the accelerating power source 22 is connected to an earth, and the minus side to the plus side of the discharge power source 20. A filament 10 is connected to an AC power source 25 through a filament transformer 24. A capacitor 31 is inserted between the screen electrode 12 and the accelerating electrode 13. When the capacitor 31 is inserted, plasma vibration is remarkably minimized.

Inventors:

HARA TAMIO
HAMAGAKI MANABU
AOYANAGI KATSUNOBU
KUSAKABE KAZUTOSHI

Application Number:

JP19920891A

Publication Date:

December 10, 1993

Filing Date:

August 08, 1991

Export Citation:

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Assignee:

RIKAGAKU KENKYUSHO
JEOL LTD

International Classes:

C23C14/32; H01L21/302; H01L21/3065; H01L21/31; H05H1/00; H05H1/24; (IPC1-7): H05H1/00; C23C14/32

Attorney, Agent or Firm:

Fujishima Ijima (1 outside)

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