Title:
PLASMA GENERATING ELECTRODE AND PLASMA REACTOR
Document Type and Number:
Japanese Patent JP2005093423
Kind Code:
A
Abstract:
To provide a plasma generating electrode capable of effectively preventing the breakage of electrodes caused by a temperature change.
The plasma generating electrode 1 comprises two or more electrodes 2 opposed to each other, and is capable of generating plasma by applying a voltage between the electrodes 2. At least one of the electrodes 2 comprises a ceramic element 3 as a dielectric, and a conductor 4. The ceramic element 3 has a thermal conductivity of ≥50 W/mK, a dielectric breakdown strength of ≥10 kV/mm, and a dielectric constant of ≥5.
Inventors:
MIYAIRI YUKIO
FUJIOKA YASUMASA
MASUDA MASAAKI
FUJIOKA YASUMASA
MASUDA MASAAKI
Application Number:
JP2004231000A
Publication Date:
April 07, 2005
Filing Date:
August 06, 2004
Export Citation:
Assignee:
NGK INSULATORS LTD
HONDA MOTOR CO LTD
HONDA MOTOR CO LTD
International Classes:
H05H1/24; B01D53/56; B01D53/62; B01D53/74; B01J19/08; F01N3/08; (IPC1-7): H05H1/24; B01D53/56; B01D53/62; B01D53/74; B01J19/08; F01N3/08
Domestic Patent References:
| JPH02145403A | 1990-06-04 | |||
| JPH0589942A | 1993-04-09 | |||
| JP2003124085A | 2003-04-25 | |||
| JPH06234508A | 1994-08-23 | |||
| JPS557564A | 1980-01-19 | |||
| JPH1066828A | 1998-03-10 | |||
| JPH02115024A | 1990-04-27 | |||
| JPH0849525A | 1996-02-20 | |||
| JP2003192313A | 2003-07-09 |
Attorney, Agent or Firm:
Ippei Watanabe
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