To provide a plasma generating electrode, and a plasma reactor, having excellent heat resistance, in which thermal stress is reduced to effectively prevent distortion or breakage of the electrode due to temperature change even in a case where temperature difference is locally generated in the plasma electrode, and in which uniform and stable plasma can be generated.
In electrodes 2 and 2 facing each other, at least one of them comprises a plate-shaped ceramic body as dielectric, and conductive film disposed inside the ceramic body. A holding member 3 fixes one of the electrodes 2 at one end part (fixed end part 5a) in an overhanging state. As a whole, both the electrodes 2 are held in the overhanging state alternately in different directions at a prescribed interval from each other. When the plasma electrode is assembled and/or when plasma is generated, the other end surface (free end part 5b) of the electrode 2 is set in a contact state with the holding member 3.
MASUDA MASAAKI
KONDO ATSUO
HONDA MOTOR CO LTD