To provide a plasma generator using microwaves in which occurrence of a discharging phenomenon inside a wave guide tube can be prevented simply and surely as well.
The plasma generator PU is provided with a microwave generator 10, a wave guide tube 20 which is connected with the microwave generator 10 and transmits the microwaves , and a plasma generating portion 30 arranged in the wave guide tube 20. The plasma generating portion 30 has an antenna 40 of a rod shape for receiving the microwaves . The antenna 40 includes a side of a first end portion 41 introduced inside the wave guide tube 20 and a side of a second end portion 42 projected out of the wave guide tube 20. The first end portion 41 is grounded and energy of the microwave is given to treatment gas at the second end portion 42.
HIROSE TOMOYUKI
MIKE MASAAKI
MATSUUCHI HIDETAKA
IWASAKI RYUICHI
Takao Ito
Jiro Higuchi
Haruhiro Hirata