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Patent Searching and Data


Title:
PLASMA GENERATOR AND PLASMA GENERATING APPARATUS
Document Type and Number:
Japanese Patent JP2009107883
Kind Code:
A
Abstract:

To provide a plasma generator which hardly causes cracks due to impressed thermal stress caused by heat at operation, and a plasma generating apparatus using such a plasma generating body.

The plasma generator has a first electrode 1 and a first insulating part 3 to support the first electrode 1, a second electrode 2 disposed facing the first electrode 1 and a second insulating part 4 to support the second electrode 2, and a first side part 5 to which one ends of the first insulating part 3 and the second insulating part 4 are joined. A first line segment connecting along the joining portion of the first insulating part 3 and the first side part 5 at the corner of an inner space S made by the first insulating part 3 and the first side part 5 has non-linear portions.


Inventors:
FUKUDA KENJIRO
IINO KUNIO
MORIYAMA YOSUKE
Application Number:
JP2007281603A
Publication Date:
May 21, 2009
Filing Date:
October 30, 2007
Export Citation:
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Assignee:
KYOCERA CORP
International Classes:
C01B13/11; B01D53/56; B01D53/74; B01J19/08; F01N3/02; F01N3/08; H05H1/24