Title:
プラズマ発生装置及びプラズマ発生方法
Document Type and Number:
Japanese Patent JPWO2012063857
Kind Code:
A
Inventors:
Makoto Miyamoto
Kazutoshi Takenoshita
Yuki Kumagai
Nakayama Proton
Hideo Nojima
Kazutoshi Takenoshita
Yuki Kumagai
Nakayama Proton
Hideo Nojima
Application Number:
JP2011075820W
Publication Date:
May 12, 2014
Filing Date:
November 09, 2011
Export Citation:
Assignee:
Samsung Electronics Samsung Electronics Co, Inc.., Ltd.
International Classes:
A61L9/22; H05H1/24; B01J19/08
Attorney, Agent or Firm:
Ryuhei Nishimura
Akiko Sato
Akiko Sato