Title:
プラズマ発生装置およびこれを用いた薄膜形成装置
Document Type and Number:
Japanese Patent JP4875527
Kind Code:
B2
Inventors:
Yayoi Atsushi
Hideo Yamakoshi
Koji Satake
Hideo Yamakoshi
Koji Satake
Application Number:
JP2007088751A
Publication Date:
February 15, 2012
Filing Date:
March 29, 2007
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES,LTD.
International Classes:
H01L21/205; C23C16/509; C23C16/54; H01L21/31; H05H1/46
Domestic Patent References:
| JP2005064465A | ||||
| JP2001338885A | ||||
| JP7226395A | ||||
| JP2006172943A | ||||
| JP2004193462A | ||||
| JP2000268994A | ||||
| JP2006283119A | ||||
| JP2005281718A |
Attorney, Agent or Firm:
Noriharu Fujita
Kunio Ueda
Kunio Ueda