Title:
PLASMA GENERATOR FOR VERY SHORT WAVELENGTH
Document Type and Number:
Japanese Patent JPH0529094
Kind Code:
A
Abstract:
PURPOSE: To provide a plasma generator for very short wavelength laser for performing a long reunited plasma owing to high efficiency generation of high temp. plasma and rapid cooling of the plasma.
CONSTITUTION: A high temp. plasma source 7 and a shielding plate 3 where a long and narrow slit 4 is formed are arraged in a close manner. Plasma 8 is emitted through the slit 4 to form a long plasma with a high gain in a very short wavelength due to abrupt adiabatic expansion.
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Inventors:
TOMIE TOSHIHISA
Application Number:
JP20473491A
Publication Date:
February 05, 1993
Filing Date:
July 19, 1991
Export Citation:
Assignee:
AGENCY IND SCIENCE TECHN
International Classes:
H01S4/00; H05H1/22; H05H1/24; H01S3/097; (IPC1-7): H01S3/097; H05H1/24
Attorney, Agent or Firm:
Director, Electronic Technology Research Institute, AIST
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