Title:
プラズマ照射システム
Document Type and Number:
Japanese Patent JP6644616
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve practicality of a plasma irradiation system.SOLUTION: In the installation device 12 of a plasma irradiation system 10, an indicator 50 having optical characteristics changing by plasma irradiation is installed in the installation part 160 of an object 36 to be processed by means of a holding head 26. Next, in a plasma irradiation device 14, the indicator 50 is irradiated with plasma by an irradiation head 74, along with the object 36 to be processed. In a measurement device 16, optical characteristics of the indicator 50 installed in the object 36 to be processed are measured by a color-difference meter 124. Consequently, when plasma processing is executed for the object 36 to be processed, judgement can be made automatically, in real time, whether or not plasma processing for the object 36 to be processed has been executed, and practicality of the plasma irradiation system 10 is improved.SELECTED DRAWING: Figure 1
Inventors:
Niwa Yodai
Takahiro Kondo
Noriaki Iwaki
Kawataku Tetsunori
Takahiro Kondo
Noriaki Iwaki
Kawataku Tetsunori
Application Number:
JP2016070447A
Publication Date:
February 12, 2020
Filing Date:
March 31, 2016
Export Citation:
Assignee:
Fuji corporation
International Classes:
H05H1/00
Domestic Patent References:
| JP2011530085A | ||||
| JP2015013982A | ||||
| JP2015186913A | ||||
| JP2015149263A |
Attorney, Agent or Firm:
Patent business corporation NEXT
Yasutaka Fukatsu
Yuki Kataoka
Yasutaka Fukatsu
Yuki Kataoka