Title:
Plasma light source
Document Type and Number:
Japanese Patent JP6111145
Kind Code:
B2
Inventors:
Kuwahara Ichi
Kazuhiko Horioka
Masuda Masashi
Kazuhiko Horioka
Masuda Masashi
Application Number:
JP2013116727A
Publication Date:
April 05, 2017
Filing Date:
June 03, 2013
Export Citation:
Assignee:
Ihi Co., Ltd.
National University Corporation Tokyo Institute of Technology
National University Corporation Tokyo Institute of Technology
International Classes:
H05G2/00; H01S3/00
Domestic Patent References:
| JP2013089634A | ||||
| JP11202098A | ||||
| JP2009544165A |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Shunichi Takahashi
Masakazu Ito
Toshio Takamatsu
Iwa Saki Kokuni
Shunichi Takahashi
Masakazu Ito
Toshio Takamatsu
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