Title:
プラズマ質量分析計
Document Type and Number:
Japanese Patent JP4636800
Kind Code:
B2
Abstract:
A plasma source mass spectrometer ( 20 ) having an ion beam extraction electrode ( 45 ) associated with a skimmer cone ( 40 ) to restrict the pumping of gas from a region ( 60 ) immediately behind the skimmer cone orifice ( 42 ) to provide a higher pressure (e.g. 1-10-2 Torr) in the region ( 60 ) compared to the pressure downstream of the electrode ( 45 ) (e.g. 10-3-10-4 Torr). This provides a collisional gas volume ( 60 ) for plasma ( 28 ) for attenuating polyatomic and multicharged interfering ions prior to extraction of an ion beam ( 49 ). In one embodiment a substance (e.g. hydrogen) can be supplied into the region ( 60 ) to assist attenuation of polyatomic and multicharged interfering ions by reactive or collisional interactions.
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Inventors:
Karinichenko, Iori
Application Number:
JP2003575404A
Publication Date:
February 23, 2011
Filing Date:
February 27, 2003
Export Citation:
Assignee:
Varian Australia Pty.
International Classes:
G01N27/62; H01J49/10; B01D59/44; C12Q1/00; H01J49/04; H01J49/24; H01J49/26; H01J49/40
Domestic Patent References:
| JP10040857A | ||||
| JP3040748U | ||||
| JP1311554A | ||||
| JP2000067804A | ||||
| JP11509036A | ||||
| JP2002525801A | ||||
| JP9129174A | ||||
| JP11040089A | ||||
| JP7240169A | ||||
| JP7325020A |
Foreign References:
| WO2003041115A1 |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Mio Kawasaki