Title:
PLASMA MEASURING METHOD AND PLASMA TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP2005317341
Kind Code:
A
Abstract:
To accurately measure a plurality of plasma positions simultaneously or accurately measure a plasma from a plurality of different directions with a simple and low-cost structure.
Light ejected from a plasma is conducted to a CCD camera 4 by a plurality of optical fibers 2, 2, ... set in parallel, and its intensity of the light is measured. The optical fiber 2 is to be flexible, so that a flexibility of a selection of a measurement position and a measurement direction is improved.
Inventors:
MIZUKOSHI TOMOHIDE
SUETOMI HIDEKAZU
FUKAZAWA KOJI
SUETOMI HIDEKAZU
FUKAZAWA KOJI
Application Number:
JP2004133501A
Publication Date:
November 10, 2005
Filing Date:
April 28, 2004
Export Citation:
Assignee:
KONICA MINOLTA HOLDINGS INC
International Classes:
H05H1/00; C23F4/00; H01L21/304; H01L21/3065; (IPC1-7): H05H1/00; C23F4/00; H01L21/304; H01L21/3065
Attorney, Agent or Firm:
Hiroshi Arafune
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