PLASMA PROCESSING APPARATUS AND METHOD AND WINDING MACHINE

Japanese Patent JP2017103132

A

PROBLEM TO BE SOLVED: To provide a plasma processing apparatus and method and a winding machine in which unevenness in removal of an insulator portion of a filamentous or linear member is unlikely to occur.SOLUTION: A plasma processing apparatus comprises a tubular member 2 having a tubular dielectric portion 2a having a through-hole 2c into which a filamentous or linear member 1 formed by covering the outer periphery of a conductor core 1a with an insulator portion 1b can be inserted, and a tubular electrode 2b arranged on the outer periphery of the dielectric portion, a gas supply device 3 connected to the tubular dielectric portion, a power supply device 5 which is electrically connected to the conductor core or the electrode to apply electric power, and a grip member 4 which grips one end of the filamentous or linear member and is electrically connectable to the conductor core. One of the grip member and the electrode is grounded while gas is supplied from the gas supply device into the through-hole, and the power supply device is electrically connected to the other of the grip member and the electrode to apply electric power between the grip member and the electrode and generate plasma in the through-hole of the dielectric portion so that the insulator portion on the outer periphery of the conductor core is removed.SELECTED DRAWING: Figure 1A

OKUMURA TOMOHIRO
NAKAO OSAMU

JP2015236376A

June 08, 2017

December 03, 2015

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PANASONIC IP MAN CORP

H05H1/24; H01B13/00; H01B19/04; H01F41/04; H01F41/076

Mitsuo Tanaka
Samejima Mutsumi
Hiroshi Okabe
Mitsuo Wada

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