PLASMA PROCESSING APPARATUS - SAKIGAKE HANDOTAI KK

Title:

PLASMA PROCESSING APPARATUS

Document Type and Number:

Japanese Patent JP2014157760

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide a novel plasma processing apparatus and plasma processing method, capable of making a surface of a stereoscopic structure in a complicated geometry expose to plasma with high efficiency and uniformly.SOLUTION: The plasma processing apparatus includes: a processing container 12 including a plasma generating section; a control section 14; and a drive section 16. The processing section 12 includes a plasma generation section 11 for generating plasma therein. The control section 14 includes a power circuit for supplying electric power required to generate plasma in the processing container 12. The drive section 16 includes a power transmission section that generates power and transmits power from the outside of the processing container 12 to the processing container 12.

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Inventors:

TAGUCHI KOJI
YAMAZAKI MITSUO
TSUCHIDA TOMOHITO

Application Number:

JP2013028782A

Publication Date:

August 28, 2014

Filing Date:

February 18, 2013

Export Citation:

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Assignee:

SAKIGAKE HANDOTAI KK

International Classes:

H05H1/46; B01J19/08

Attorney, Agent or Firm:

Masashi Moriwaki
Tetsuro Kawahara

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