Title:
PLASMA-PROCESSING APPARATUS
Document Type and Number:
Japanese Patent JP3839628
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To achieve sufficient cooling by placing a sheet member, in contact with a discharge tube or a microwave transmission window member and to prevent deterioration of the sheet member due to beat wilding between the discharge bulb or microwave transmitting window member and the sheet member or due to ultraviolet rays or the like.
SOLUTION: A metal member 14, consisting of a metal material, allocated in the surrounding of a discharge tube 6 and a flexible sheet member 12 provided at the surrounding between the discharge bulb 6 and metal member 14 are provided at the connecting portion of a microwave waveguide 10 an the discharge tube 6. The sheet member 12 includes a pair of heat-resistant layers 12a, 12c, consisting of a heat-resistant material allocated at the inner circumferential side facing to the discharge tube 6 and at the outer circumference side facing to the metal member 14 and a heat conductive layer 12b consisting of a heat conducting material arranged between a pair of heat-resistant layers 12a, 12c.
Inventors:
Yoshizo Tsugami
Takashi Miyamoto
Hiroshi Takeishi
Takashi Miyamoto
Hiroshi Takeishi
Application Number:
JP34016899A
Publication Date:
November 01, 2006
Filing Date:
November 30, 1999
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
H01L21/302; H01L21/3065; (IPC1-7): H01L21/3065
Domestic Patent References:
| JP11135485A |
Attorney, Agent or Firm:
Kazuo Sato
Hiroyuki Nagai
Junpei Okada
Satoshi Nazuka
Hiroyuki Nagai
Junpei Okada
Satoshi Nazuka