Title:
PLASMA PROCESSING EQUIPMENT AND PLASMA GENERATION CHAMBER
Document Type and Number:
Japanese Patent JP2009026885
Kind Code:
A
Abstract:
To prevent UV-rays generated from plasma from leaking outside, without affecting the state of plasma generated in the plasma generating chamber.
The plasma processing equipment is provided with a processing chamber 102 having a table 106 for mounting a wafer W, and a plasma generating chamber 104 interconnected therewith. The plasma generating chamber comprises a reaction vessel 140 having a tubular sidewall 142, a coil 116 wound around the sidewall and applied with predetermined high-frequency power, and a coating 150 covering the outer surface of the sidewall. The coating is constituted of a heat-resistant insulating material which shields the UV-rays from the plasma generated inside the reaction vessel.
Inventors:
HAYASHI DAISUKE
Application Number:
JP2007187262A
Publication Date:
February 05, 2009
Filing Date:
July 18, 2007
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/3065
Domestic Patent References:
JPH08330285A | 1996-12-13 | |||
JP2000223474A | 2000-08-11 |
Attorney, Agent or Firm:
Hiroaki Oyama
Previous Patent: CIRCUIT MODULE AND ELECTRIC COMPONENT
Next Patent: METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
Next Patent: METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE