Title:
プラズマ処理装置及び方法
Document Type and Number:
Japanese Patent JP3986204
Kind Code:
B2
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| JPH0688224 | HIGH-FREQUENCY DEVICE |
| JPH074980 | [Name of invention] Airtight fluid coupling |
| JPH0444218 | RESIST ASHING DEVICE |
Inventors:
Toshiaki Hongo
Satoshi Osawa
Satoshi Kawakami
Mitsuhiro Yuasa
Satoshi Osawa
Satoshi Kawakami
Mitsuhiro Yuasa
Application Number:
JP11888999A
Publication Date:
October 03, 2007
Filing Date:
April 27, 1999
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/302; H01L21/31; B01J19/08; C23C16/44; C23C16/511; H01L21/3065
Domestic Patent References:
| JP1128428A | ||||
| JP9115917A | ||||
| JP8203836A | ||||
| JP11087341A | ||||
| JP11074258A | ||||
| JP7326491A | ||||
| JP2209484A |
Foreign References:
| US5413688 |
Attorney, Agent or Firm:
Ryosuke Fujimoto