Title:
プラズマ処理装置
Document Type and Number:
Japanese Patent JP4029765
Kind Code:
B2
Abstract:
A dielectric window performs three functions, namely, (1) extraction of a microwave, (2) generation and transmission of a surface wave, and (3) keeping the vacuum. An O-ring, which keeps the vacuum between the dielectric window and a chamber, is arranged so as to surround the vicinity of a bottom plate 1 a of a microwave waveguide. Dielectric plates area arranged in parallel with each other in the dielectric window and performs only the transmission of a surface wave. The dielectric plates may be different from the dielectric window in at least one of a shape, a thickness, and a dielectric constant.
Inventors:
Masayasu Suzuki
Application Number:
JP2003125052A
Publication Date:
January 09, 2008
Filing Date:
April 30, 2003
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
H01L21/205; H05H1/46; B01J19/08; C23C16/511; C23F4/00; H01J37/32; H01L21/02; H01L21/3065
Domestic Patent References:
| JP2001284331A | ||||
| JP2002367968A | ||||
| JP2002006338A | ||||
| JP10284294A |
Attorney, Agent or Firm:
Fuyuki Nagai