Title:
プラズマ処理装置
Document Type and Number:
Japanese Patent JP4080793
Kind Code:
B2
Inventors:
Kaneko Takushi
Takeshi Noguchi
Takeshi Noguchi
Application Number:
JP2002184366A
Publication Date:
April 23, 2008
Filing Date:
June 25, 2002
Export Citation:
Assignee:
YAC Co., Ltd.
International Classes:
H01L21/3065; H05H1/46; H01Q1/22; H01Q1/38
Domestic Patent References:
| JP8148476A | ||||
| JP11040544A | ||||
| JP10241895A | ||||
| JP2001085196A | ||||
| JP2003229410A | ||||
| JP2001516944A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama
Tadashi Takahashi
Takashi Watanabe
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama