Title:
プラズマ処理装置
Document Type and Number:
Japanese Patent JP4219595
Kind Code:
B2
Inventors:
Yo Nakano
Tadahiro Ohmi
Tadahiro Ohmi
Application Number:
JP2002022322A
Publication Date:
February 04, 2009
Filing Date:
January 30, 2002
Export Citation:
Assignee:
ALPS ELECTRIC CO.,LTD.
Tadahiro Ohmi
Tadahiro Ohmi
International Classes:
H05H1/46; C23C16/505; H01L21/302; H01L21/3065
Domestic Patent References:
| JP11158641A | ||||
| JP8330286A | ||||
| JP6244148A | ||||
| JP6260838A | ||||
| JP10330944A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Suzuki Mitsuyoshi
Yasuhiko Murayama
Tadashi Takahashi
Takashi Watanabe
Suzuki Mitsuyoshi
Yasuhiko Murayama