Title:
プラズマ処理装置
Document Type and Number:
Japanese Patent JP7072207
Kind Code:
B2
Abstract:
To provide an electrode unit or the like in which plasma is likely to be generated.SOLUTION: Disclosed is an electrode unit 3 which is arranged in a container 2 of a dielectric body and generates plasma by glow discharge between an outer electrode 4 arranged outside the container 2. This electrode unit includes an electrode body 31 having a mesh structure, which is arranged so as to be capable of surface discharge between the inner peripheral surface of the container 2 and the electrode body.SELECTED DRAWING: Figure 3
Inventors:
Tsuyoshi Suzuki
Tomohiro Adachi
Tomohiro Adachi
Application Number:
JP2017197417A
Publication Date:
May 20, 2022
Filing Date:
October 11, 2017
Export Citation:
Assignee:
J Science Lab Co., Ltd.
International Classes:
B01J19/08; H05H1/24
Domestic Patent References:
| JP2015041409A | ||||
| JP2004248989A |
Foreign References:
| CN106714436A | ||||
| CN106686871A |
Attorney, Agent or Firm:
Atsushi Harada
Yuji Okuyama
Yuji Okuyama