Title:
プラズマ処理炉及びプラズマ処理方法
Document Type and Number:
Japanese Patent JP5144952
Kind Code:
B2
Inventors:
Shunsuke Kimura
Application Number:
JP2007097743A
Publication Date:
February 13, 2013
Filing Date:
April 03, 2007
Export Citation:
Assignee:
DOWA Thermotech Co., Ltd.
International Classes:
C23C8/36; C21D1/00; C21D1/06; C21D1/773; C21D9/30; F27D21/00; G01K1/14; G01K7/02; H05H1/24
Domestic Patent References:
| JP57016941U |
Attorney, Agent or Firm:
Koji Hagiwara
Tetsuo Kanamoto
Miaki Kametani
Kenji Wada
Tetsuo Kanamoto
Miaki Kametani
Kenji Wada