Title:
工作物のプラズマ処理方法および装置
Document Type and Number:
Japanese Patent JP4654027
Kind Code:
B2
Abstract:
Disclosed are a method and a device for plasma treating workpieces (5). Said workpiece is inserted into a chamber (4) of a treatment station, which can be at least partly evacuated, and is positioned within the treatment station by means of a holding element. A shell-type sealing element (28) is disposed relative to a floor (29) of the chamber in order to seal an interior space of the workpiece.
Inventors:
Ritzenberg Michael
Levin Frank
Muller Hardwig
Vogel Claus
Arnold Gregor
Bere stephan
Lütrinkhaus Henkel Andreas
Vicker Matthias
Klein Jurgen
Levin Frank
Muller Hardwig
Vogel Claus
Arnold Gregor
Bere stephan
Lütrinkhaus Henkel Andreas
Vicker Matthias
Klein Jurgen
Application Number:
JP2004507553A
Publication Date:
March 16, 2011
Filing Date:
May 09, 2003
Export Citation:
Assignee:
Carhares Corpoplast Gaem Behr und Company Carga
International Classes:
B65B55/08; C23C16/44; A61L2/14; B01J3/00; B01J19/08; B08B7/00; B08B9/42; B29C49/42; B65D23/02; B65G29/00; C03C17/00; C23C14/04; C23C14/50; C23C14/56; C23C16/04; C23C16/40; C23C16/455; C23C16/458; C23C16/511; C23C16/54; B05D7/24
Domestic Patent References:
| JP2001518685A | ||||
| JP8053117A | ||||
| JP10258825A |
Foreign References:
| WO2001054164A1 | ||||
| WO2001040072A1 | ||||
| US5232717 |
Attorney, Agent or Firm:
Fujita Akira