Title:
Plasma processing method
Document Type and Number:
Japanese Patent JP6012998
Kind Code:
B2
Inventors:
Hiroki Shirahama
Application Number:
JP2012077392A
Publication Date:
October 25, 2016
Filing Date:
March 29, 2012
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
H01L21/3065; H01L21/3205; H01L21/768; H01L23/522; H05H1/46
Domestic Patent References:
| JP2010087233A | ||||
| JP2005311215A |
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