To provide a plasma treatment system, which prevents the inner surface of a treating chamber from being deteriorated due to a plasma and prevents the inner surface of the treating chamber from being turned into a heavy metal contamination source and also stabilizes the characteristics of a plasma treatment with age.
A plasma treatment apparatus consists of a plasma generator, a treating chamber 4 capable of being decompressed, a treatment gas feeding unit 13 for feeding gas to the chamber 4, a sample stand 10 for holding a sample 11 and a vacuum exhaust system 9. In this plasma treatment apparatus, the chamber 4 is provided with an outer cylinder 5 capable of withstanding a decompression and an inner cylinder 6 arranged on the inside of the cylinder 5 via a gap 14 and a heater 21 and a temperature control means 22 are provided on the cylinder 5. An inner cylinder consisting of a non-magnetic metallic material not containing heavy metals or a ceramic, carbon, silicon or quartz material is used as the cylinder 6. The cylinder 5 is heated by the heater 21 and the means 22 to control the temperature of the cylinder 6 at the desired value.
TAKAHASHI NUSHITO
OKAMURA KOICHI
HAMAZAKI RYOJI
ITO SATORU
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