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Title:
PLASMA TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP2003082465
Kind Code:
A
Abstract:

To ensure uniformity and rapidity of the treatment by highly dense plasma by providing a uniform plasma distribution in a chamber.

In the plasma treatment device comprising the chamber 2 with a substrate 10 accommodated therein and a plasma source 3 which emits the columnar free-standing plasma P in the chamber 2 and performs the plasma treatment on the substrate 10 by the plasma P emitted in the chamber 2, the substrate 10 can be disposed around the columnar plasma P in the chamber 2.


Inventors:
OKIMOTO TADAO
KUMAKIRI TADASHI
Application Number:
JP2001275657A
Publication Date:
March 19, 2003
Filing Date:
September 11, 2001
Export Citation:
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Assignee:
KOBE STEEL LTD
International Classes:
H05H1/46; B01J3/00; B01J3/02; B01J19/08; C23C16/00; C23C16/44; (IPC1-7): C23C16/44; B01J3/00; B01J3/02; B01J19/08; C23C16/00; H05H1/46
Attorney, Agent or Firm:
Toshio Yasuda