PLASMA TREATMENT DEVICE - SEKISUI CHEMICAL CO LTD

Title:

PLASMA TREATMENT DEVICE

Document Type and Number:

Japanese Patent JP2019216954

Kind Code:

A

Abstract:

To provide a plasma treatment device that can acquire temperature information of an irradiated surface of an irradiated object which a plasma and an active gas are irradiated with.SOLUTION: An active gas radiation device 100 (plasma treatment device) includes: a plasma generation part for generating a plasma; a nozzle for discharging any one or both of the plasma and an active gas generated by the plasma; and a temperature measurement part 80 for measuring temperature of an irradiated surface of an irradiated object.SELECTED DRAWING: Figure 1

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Inventors:

ATAKA MOTOHARU
UEHARA TAKESHI
TOUGI AKIKO
TAKADA MASAHIRO
OSHITA TAKAYA
TADA MAYUKA
NAGAHARA YU
INOUE TAKESHI

Application Number:

JP2018116240A

Publication Date:

December 26, 2019

Filing Date:

June 19, 2018

Export Citation:

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Assignee:

SEKISUI CHEMICAL CO LTD

International Classes:

A61B18/04; A61C19/06; H05H1/26; H05H1/28

Attorney, Agent or Firm:

Nishizawa Kazumi
Yuichiro Kawagoe
Makiko Otsuki
Hiroshi Yamaguchi

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