Title:
PLASMA TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP3789863
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To improve a cooling capacity of a discharge tube as well as a durability and a rate of operation of a device, in case an elastic material such as a silicon rubber is put in between the discharge tube and a cooling water jacket.
SOLUTION: The plasma treatment device guiding reaction gas passing inside the discharge tube (22) into a vacuum vessel (10) by exciting it with a microwave given from outside the discharge tube (22) is provided with a cooling water jacket (46) surrounding an outer periphery face of the discharge tube (10) with a given interval, a rectangular heat-resistant elastic material (56) filled in the interval, and a sheet (58) of heat resistance and an excellent thermal conductivity with its one end pinched by the outer periphery face of the discharge tube (10) and the heat-resistant elastic material (56) and the other end pinched between an inner periphery face of the cooling water jacket (46) and the heat-resistant elastic material (56).
Inventors:
Hidefumi Higashino
Application Number:
JP2002200181A
Publication Date:
June 28, 2006
Filing Date:
July 09, 2002
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
H05H1/46; C23F4/00; H01L21/205; H01L21/3065; (IPC1-7): H05H1/46; C23F4/00; H01L21/205; H01L21/3065
Domestic Patent References:
| JP7169592A | ||||
| JP10060657A | ||||
| JP10242354A | ||||
| JP11135485A | ||||
| JP5235391A | ||||
| JP2001156043A | ||||
| JP2001237222A | ||||
| JP2000218150A | ||||
| JP2001237226A |
Attorney, Agent or Firm:
Fumio Yamada
Yousuke Yamada
Yousuke Yamada
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