Title:
PLASMA TREATMENT METHOD, AND PLASMA TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP2016087525
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a plasma treatment method and a plasma treatment apparatus which are capable of efficiently performing plasma treatment to fine particles.SOLUTION: After hermetically sealing a plurality of fine particles 1 into a portable-type container 3 together with plasma gas 2 such as argon gas and nitrogen gas, the container 3 is placed in a plasma treatment apparatus 50, electric field is applied from outside the container 3, plasma is generated in the container 3 to perform plasma treatment to the fine particle 1. In such occasion, vibration is added to the container 3, and the fine particles 1 are floated in the container 3. Herein, the container 3 is a bag 30 made of flexible sheet, and a plurality of the bags are connected with each other. Therefore, plasma treatment is performed to a plurality of containers 3 (bags 30) sequentially.SELECTED DRAWING: Figure 1
Inventors:
TAKEFUCHI YUTAKA
OMORI KOJI
OMORI KOJI
Application Number:
JP2014223547A
Publication Date:
May 23, 2016
Filing Date:
October 31, 2014
Export Citation:
Assignee:
AIR WATER MACH INC
AIR WATER INC
AIR WATER INC
International Classes:
B01J19/08; H05H1/24
Domestic Patent References:
| JPH06285365A | 1994-10-11 | |||
| JP2004209188A | 2004-07-29 | |||
| JP3187999U | ||||
| JPS63107743A | 1988-05-12 | |||
| JPH0344649A | 1991-02-26 | |||
| JPH07194968A | 1995-08-01 | |||
| JP2004527077A | 2004-09-02 | |||
| JP2004323593A | 2004-11-18 |
Foreign References:
| US4737885A | 1988-04-12 |
Attorney, Agent or Firm:
Shiro Yokozawa
Toru Kawai
Kawaguchi Nobuko
Toru Kawai
Kawaguchi Nobuko