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Patent Searching and Data


Title:
PLASMA X-RAY SOURCE
Document Type and Number:
Japanese Patent JPS63308896
Kind Code:
A
Abstract:

PURPOSE: To strengthen emitted X-rays by using a capacitor bank pinched with multiple ceramic capacitors between parallel conductive plates and arranging a discharging electrode near the parallel conductive plates.

CONSTITUTION: Ceramic capacitors 20a... are pinched in sandwiches between multiple conductive plates 21, 21, 22 respectively to form a disk-shaped capacitor bank centering a discharge device 5. A discharge switch 4 is provided near the conductive plates 21, 22 and formed into a coaxial shape to reduce the inductance. When the ceramic capacitors 20a... are discharged, the circuit becomes a distributed constant circuit, and the discharge current wave-form with the quick rising time can be obtained. Since the plasma generated between electrodes 11, 12 can be strongly pinched in a short time according to this constitution, strong X-rays can be obtained.


Inventors:
ARITA HIROSHI
KUROSAWA YUKIO
SUZUKI KOJI
TOKUYAMA SHUNJI
Application Number:
JP14313287A
Publication Date:
December 16, 1988
Filing Date:
June 10, 1987
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
H05G2/00; H01J35/22; H01L21/027; H01L21/30; H05G1/00; (IPC1-7): H01J35/22; H01L21/30; H05G1/00
Attorney, Agent or Firm:
Katsuo Ogawa