To provide a plastic film deposition system for production of an adhesion evaluation sample with which the adhesion strength of a two-layered flexible substrate can be rapidly measured with good accuracy.
The plastic film deposition system has a plurality of deposition chambers 3 for forming an underlying metallic layer on a plastic film by a dry plating method, then in succession, forming a metallic layer on the underlying metallic layer by a dry plating method in vacuum. The deposition system is equipped with the second deposition chamber 4 for forming the underlying metallic layer on the plastic film in the first deposition chamber 3 out of the above deposition chambers, then forming the pattern for measuring the adhesion strength of the plastic film formed with the underlying metallic layer and a conveyance section 2 for conveying the substrate to the ensuing process for generation of the flexible substrate.
Tomoyasu Sakaguchi
Hiroki Naito
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