Title:
PLATE FEED STAND
Document Type and Number:
Japanese Patent JPS5285462
Kind Code:
A
Abstract:
PURPOSE:To increase the number of charge of paltes and facilitate their removal by providing a stopper piece connected to an operating lever to the inclined chute provided with rails for guiding semiconductor-wafer fixing plates so as not to lay down the plate.
Inventors:
TSUKAHARA MASARU
TAKAISHI MASARU
HORIKOU HITOSHI
WAKATSUKI HISAAKI
TANABE SADAO
FUJITA MASATO
TAKAISHI MASARU
HORIKOU HITOSHI
WAKATSUKI HISAAKI
TANABE SADAO
FUJITA MASATO
Application Number:
JP155876A
Publication Date:
July 15, 1977
Filing Date:
January 09, 1976
Export Citation:
Assignee:
HITACHI LTD
International Classes:
B65H9/00; B65H7/00; H01L21/304; H01L21/677; H01L21/68; (IPC1-7): B65H7/00; H01L21/68