板状基板の処理装置及び処理方法

Title:

板状基板の処理装置及び処理方法

Document Type and Number:

Japanese Patent JP4444474

Kind Code:

B2

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Inventors:

Takahara Yoichi
Koji Hara
Toshiyuki Osawa
Yasushi Sano
Hiro Kikuchi

Application Number:

JP2000266013A

Publication Date:

March 31, 2010

Filing Date:

August 30, 2000

Export Citation:

Assignee:

株式会社日立製作所

International Classes:

G02F1/13; H01L21/306; B08B3/04; B08B3/12; B08B7/04; G02F1/1333; H01L21/304

Domestic Patent References:

Attorney, Agent or Firm:

Polaire Patent Business Corporation
Katsuo Ogawa
Kyosuke Tanaka
Takashi Sasaki

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