Title:
板状ワーク乾燥機
Document Type and Number:
Japanese Patent JP6917822
Kind Code:
B2
Abstract:
To efficiently dry a tabular work-piece subsequent to machining.SOLUTION: There is provided a tabular work-piece dryer 1 comprising a box 2 provided with an entrance/exit port 210 for a tabular work-piece W to enter into/exit from the box 2 therethrough, a pair of air knives 3 each provided with an air ejection port 330 disposed to face each other via a tabular work-piece W entering into or exiting from the box 2 to eject air onto either face of the tabular work-piece W.SELECTED DRAWING: Figure 1
Inventors:
Takahara Shimon
Ryota Goto
Yang Yunfeng
Keita Fuse
Ryota Goto
Yang Yunfeng
Keita Fuse
Application Number:
JP2017149750A
Publication Date:
August 11, 2021
Filing Date:
August 02, 2017
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
F26B5/14; B23Q11/00; F26B13/28; H01L21/677
Domestic Patent References:
| JP2005125158A | ||||
| JP2009198676A | ||||
| JP51002786U | ||||
| JP2001208473A |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office