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Title:
PLATY BODY ARRANGING PITCH CHANGING DEVICE
Document Type and Number:
Japanese Patent JPH05275514
Kind Code:
A
Abstract:

PURPOSE: To quickly change the arranging pitch of platy bodies by simultaneously moving platy body holding members on both sides by using a driving shaft composed of a first shaft equipped with a right-hand thread and second shaft equipped with a left-hand thread, with the first and second shafts being coaxially coupled with each other.

CONSTITUTION: When a drive motor 62 starts to rotate, a driving shaft 4 is rotated through a driving belt 64 and pulley 61. When the shaft rotates clockwise, a first driving arm 51 engaged with a first shaft 41 equipped with a right- hand thread moves rightward and a second driving arm 52 engaged with a second shaft 42 equipped with a left-hand thread moves leftward. As a result, the arranging pitch of platy body holding members 3 and 3 becomes longer. When the shaft 4 rotates counterclockwise, on the contrary, the pitch becomes shorter. Since a link mechanism 7 controls the arranging intervals of the members 3 and 3 to regular intervals, the arranging pitch of the members 3 and 3 can be continuously changed by rotating the shaft 4 clockwise or counterclockwise. In addition, the arranging pitch can be strictly controlled by the rotation of the shaft 4.


Inventors:
Yoshihiko Sasaki
Kikuchi Hisashi
Application Number:
JP9606092A
Publication Date:
October 22, 1993
Filing Date:
March 24, 1992
Export Citation:
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Assignee:
Tokyo Electron Tohoku Ltd.
International Classes:
H01L21/677; H01L21/68; (IPC1-7): H01L21/68
Attorney, Agent or Firm:
Masahiko Oi



 
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