PURPOSE: To achieve high speed and high accuracy at the time of positioning for a certain aimed position by using estimated or measured disturbance force to an operational part so as to perform disturbance compensation, and by integrating the deflection between the output of an ideal model part and that of an operational condition detection part so as to carry out disturbance compensation, at the same time.
CONSTITUTION: A driving command value of control valve group that drives and controls a pneumatic actuator is output by an operational control part 10 as well as by a disturbance compensation part 11. Positional deflection between the operational part and an aimed position, speed of the operational part by a differentiator 12, the deflection between reference pressure of an air chamber of the actuator and the measured pressures P1, P2, are input by amplifiers 13a, 13b of the operational control part 10, and a feedback control system in the condition of a pneumatic driving system is formed thereby. The disturbance compensation part 11 is composed of a forward disturbance compensator 21, an ideal response generation part 23, a deflection integrating part 22, a weighting part 19, and of a disturbance compensation command value adder 20, while the outputs of the amplifiers 13a, 13b are corrected. The positioning for a certain aimed position can be thus be performed at a high speed and with high accuracy.
UMEDA YOSHIO
TAKASO HIROSHI
TACHIKAWA MASAICHIRO
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