Title:
POD-SHELL CLEANING APPARATUS AND POD-SHELL CLEANING METHOD
Document Type and Number:
Japanese Patent JP2007129160
Kind Code:
A
Abstract:
To provide a pod-shell cleaning apparatus and a method therefor whereby metal contamination of a pod shell can be removed.
The pod-shell cleaning apparatus has a cleaning vessel 4 for cleaning a pod shell, a base 36 disposed in the cleaning vessel and for so holding the pod shell as to orient its opening portion downward, a motor 34 for rotating the base via a driving gear 45, and nozzles disposed on the base and for jetting respectively a chemical liquid and a pure water onto the inner surface of the pod shell held on the base.
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Inventors:
MORIYAMA SHIGERU
OSAWA TADAYASU
OSAWA TADAYASU
Application Number:
JP2005322605A
Publication Date:
May 24, 2007
Filing Date:
November 07, 2005
Export Citation:
Assignee:
KAIJO KK
International Classes:
H01L21/304; B08B3/02
Attorney, Agent or Firm:
Mutsumi Yanase
Atsushi Watanabe
Atsushi Watanabe