Title:
偏光特性画像計測装置、偏光特性画像計測方法
Document Type and Number:
Japanese Patent JP6764880
Kind Code:
B2
Abstract:
A polarization property image measurement device includes: a first radiation unit that radiates light beams in different polarization conditions onto a target object after subjecting the light beams to intensity modulation at frequencies different from one another; a light receiving unit including first photoelectric conversion units that photoelectrically convert the light beams having been radiated from the first radiation unit and scattered at the target object in correspondence to each of the different polarization conditions, and second photoelectric conversion units that photoelectrically convert visible light from the target object; and a processor that detects signals individually output from the first photoelectric conversion units at the different frequencies and differentiates each signal from other signals so as to determine an origin of the signal as one of the light beams; and creates an image of the target object based upon signals individually output from the second photoelectric conversion units.
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Inventors:
Takanori Kojima
Akatsuki Otate
Toru Takagi
Akatsuki Otate
Toru Takagi
Application Number:
JP2017555180A
Publication Date:
October 07, 2020
Filing Date:
December 12, 2016
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01N21/21; G01J4/04; G01N21/27
Domestic Patent References:
| JP201224283A | ||||
| JP2003270095A | ||||
| JP2015180864A | ||||
| JP2007139751A |
Foreign References:
| US20050041249 | ||||
| WO2015015722A1 | ||||
| WO2013094121A1 | ||||
| WO2013164915A1 |
Attorney, Agent or Firm:
Fuyuki Nagai
Naomasa Shiraishi
Naomasa Shiraishi