Title:
偏光方位検出型2次元受光タイミング検出装置およびそれを用いた表面形状計測装置
Document Type and Number:
Japanese Patent JP3747471
Kind Code:
B2
Abstract:
The detection light of polarization bearing is synchronized with slit light scanning so as to two-dimensionally record the polarization bearing using a pair of analyzers (5,6) and storage type image detectors (7,8) that are in crossed Nicols arrangement. An independent claim is also included for surface shape measuring device.
Inventors:
Mitsuhiro Ishihara
Application Number:
JP2003573381A
Publication Date:
February 22, 2006
Filing Date:
March 03, 2003
Export Citation:
Assignee:
Takatake Manufacturing Co., Ltd.
International Classes:
G01B11/24; G01B11/25; G01J4/04
Domestic Patent References:
| JP11352054A | ||||
| JP10206132A | ||||
| JP9126739A | ||||
| JP7229725A | ||||
| JP6258435A | ||||
| JP6034331A | ||||
| JP3269205A |