Title:
POLARIZED LIGHT IRRADIATION DEVICE
Document Type and Number:
Japanese Patent JP3888141
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a polarized light irradiation device which can performs light alignment processing for a work having a light alignment layer formed while preventing water inhibition reaction or oxygen inhibition reaction by supplying a small amount of dry gas or substituting gas.
SOLUTION: The polarized light irradiation device, described in a claim 1, has an optical system which emits polarized light and a work stage on which the work having the light alignment layer formed is mounted. The work stage is provided with a work stage heating means and put in a processing chamber having a gas intake and a transmission plate which transmits the polarized light is provided to a part of a wall forming the processing chamber, supported on the wall of the processing chamber across an elastic member, and arranged in contact with only the elastic member, which is made to deform by the thermal expansion of the transmission plate to fill the processing chamber with dry gas introduced from the gas intake; while the work stage heating means heats the work stage, the work is irradiated with the polarized light through the transmission plate.
Inventors:
Shinji Suzuki
Yamada Sayu
Yamada Sayu
Application Number:
JP2001354068A
Publication Date:
February 28, 2007
Filing Date:
November 20, 2001
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
G02B5/30; G02B19/00; G02F1/13363; G02F1/1337; (IPC1-7): G02B19/00; G02B5/30; G02F1/13363; G02F1/1337
Domestic Patent References:
| JP10090684A | ||||
| JP11194345A | ||||
| JP11194344A |