Title:
Polish device
Document Type and Number:
Japanese Patent JP6232295
Kind Code:
B2
Inventors:
Nobuyuki Takahashi
Toru Maruyama
Sakukawa Takashi
Osamu Nabeya
Toru Maruyama
Sakukawa Takashi
Osamu Nabeya
Application Number:
JP2014003237A
Publication Date:
November 15, 2017
Filing Date:
January 10, 2014
Export Citation:
Assignee:
Ebara Corporation
International Classes:
B24B37/30; B24B37/005; B24B37/34; B24B49/02; B24B49/16; H01L21/304
Domestic Patent References:
| JP2005081507A | ||||
| JP62241663A | ||||
| JP2009131920A |
Attorney, Agent or Firm:
Isamu Watanabe
Tetsuya Hirosawa
Tetsuya Hirosawa