Title:
導電性材料を蒸着および研磨するための研磨物品
Document Type and Number:
Japanese Patent JP4405805
Kind Code:
B2
Abstract:
An abrasive article is described. The article is suitable for the deposition and mechanical polishing of a conductive material, and comprises: a polishing layer having a textured surface comprising a binder and a second surface opposite the textured surface, the polishing layer further comprising a first channel extending therethrough; a backing having a first backing surface and a second backing surface, the first backing surface associated with the second surface of the polishing layer, the backing comprising a second channel coextensive with the first channel and extending through the backing from the first backing surface to the second backing surface; the first channel and the second channel dimensioned with respect to one another so that the textured surface of the polishing layer is outside of a line of sight.
Inventors:
Rugg, Paul S.
Application Number:
JP2003552490A
Publication Date:
January 27, 2010
Filing Date:
October 15, 2002
Export Citation:
Assignee:
3M INNOVATIVE PROPERTIES COMPANY
International Classes:
B24B37/24; B24B37/04; B24B57/02; B24D3/28; B24D11/02; H01L21/304
Domestic Patent References:
| JP2001150333A | ||||
| JP2001522729A | ||||
| JP2001517558A | ||||
| JP6505200A | ||||
| JP2001219362A | ||||
| JP2001277104A | ||||
| JP2001308046A |
Foreign References:
| WO2001091972A1 |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Nagasaka Tomoyasu
Masaya Nishiyama
Takashi Ishida
Tetsuji Koga
Nagasaka Tomoyasu
Masaya Nishiyama