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Patent Searching and Data


Title:
Polish liquid for metal, and a grinding method
Document Type and Number:
Japanese Patent JP6334172
Kind Code:
B2
Inventors:
市毛 康裕
芳賀 浩二
近藤 誠一
Application Number:
JP2013556408A
Publication Date:
May 30, 2018
Filing Date:
January 29, 2013
Export Citation:
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Assignee:
日立化成株式会社
International Classes:
C09K3/14; B24B37/00; C09G1/02; H01L21/304
Domestic Patent References:
JP2007150264A
JP200773548A
JP2011119380A
Attorney, Agent or Firm:
三好 秀和