To provide an economically advantageous polished object holding material shortened in a dressing time for the polished object holding material, suppressed in scratch to the polished object, and improved in warp precision in a thin substrate, substrate thickness precision, and lifetime.
The polished object holding material is formed by joining one layer of a liquid crystal polymer film to both sides including a base layer of a plate-like material 4 of one of a metal plate, a fiber-reinforced plastic plate, and a plastic plate via a thermosetting adhesive, or the polished is formed by stacking one layer of a liquid crystal polymer film on both sides of a glass long fiber base material 2 (prepreg) in which a plurality of thermosetting resins is impregnated.
FUKUKAWA HIROSHI
Masamichi Tohei
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