To provide a polishing and cleaning composite apparatus which can clean simultaneously upon finishing of polishing.

The polishing and cleaning composite apparatus includes at least a conveying means for conveying a thin plate disc-like material to be treated, a polishing tool for polishing the material to be treated, conveyed by the conveying means, and a drive means for driving the polishing tool to the material to be treated. The polishing and cleaning composite apparatus continuously performs a step of driving the polishing tool by the drive means to the material to be treated and pouring an abrasive to the polishing tool, and a step of pouring cleaning water to the polishing tool. Thus, the gap of time from the polishing step to the cleaning step can be eliminated.