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Patent Searching and Data


Title:
POLISHING CLOTH
Document Type and Number:
Japanese Patent JP2003188124
Kind Code:
A
Abstract:

To provide polishing cloth which makes it harder for slurry to enter a belt than before.

The polishing cloth is stuck on a polishing belt 2 having an opening window part for end-point detection; and a light-transmissive film 7 for end-point detection is stuck at a place corresponding to the opening window part 5 of the abrasive belt 2, and a liner 9 is stuck on the transmissive film 7 and also stuck across an adhesive layer on parts other than the place corresponding to the opening window part 5. This polishing cloth 1 has a light- transmissive film 7 for end-point detection stuck on the place corresponding to the opening window part 5 of the polishing belt 2 and the end point of the surface state of a polished body can be detected through the transmissive film 7.


Inventors:
Hanamoto, Takashi
Hattori, Mineo
Yokomichi, Yasuji
Application Number:
JP2001000381533
Publication Date:
July 04, 2003
Filing Date:
December 14, 2001
Export Citation:
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Assignee:
RODEL NITTA CO
International Classes:
B24B21/00; B24B37/00; B24B37/013; B24B37/04; B24B37/20; B24B37/24; B24D11/00; H01L21/304; (IPC1-7): H01L21/304; B24B21/00; B24B37/00